Formation and in-situ etching processes for metal layers

ABSTRACT

The present disclosure relates to a semiconductor device and a manufacturing method of fabricating a semiconductor structure. The method includes forming an opening in a substrate and depositing a conformal metal layer in the opening. The depositing includes performing one or more deposition cycles. The deposition includes flowing a first precursor into a deposition chamber and purging the deposition chamber to remove at least a portion of the first precursor. The method also includes flowing a second precursor into the deposition chamber to form a sublayer of the conformal metal layer and purging the deposition chamber to remove at least a portion of the second precursor. The method further includes performing a metallic halide etching (MHE) process that includes flowing a third precursor into the deposition chamber.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experiencedexponential growth. Technological advances in IC materials and designhave produced generations of ICs where each generation has smaller andmore complex circuits than the previous generation. In the course of ICevolution, functional density (e.g., the number of interconnecteddevices per chip area) has generally increased while geometry size(e.g., the smallest component or line that can be created using afabrication process) has decreased. This scaling down process generallyprovides benefits by increasing production efficiency and loweringassociated costs.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the common practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofillustration and discussion.

FIGS. 1-3B are views of semiconductor structures, in accordance withsome embodiments.

FIG. 4 is a configuration of a semiconductor wafer manufacturing system,in accordance with some embodiments.

FIG. 5 is a flow diagram of an exemplary method of forming layers usingmulti-cycle deposition and etching processes, in accordance with someembodiments.

FIGS. 6A-6F are cross-sectional views of semiconductor structures, inaccordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides different embodiments, or examples,for implementing different features of the provided subject matter.Specific examples of components and arrangements are described below tosimplify the present disclosure. These are, of course, merely examplesand are not intended to be limiting. For example, the formation of afirst feature over a second feature in the description that follows mayinclude embodiments in which the first and second features are formed indirect contact, and may also include embodiments in which additionalfeatures are disposed between the first and second features, such thatthe first and second features are not in direct contact. In addition,the present disclosure may repeat reference numerals and/or letters inthe various examples. This repetition does not in itself dictate arelationship between the various embodiments and/or configurationsdiscussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

The acronym “FET,” as used herein, refers to a field effect transistor.An example of a FET is a metal oxide semiconductor field effecttransistor (MOSFET). MOSFETs can be, for example, (i) planar structuresbuilt in and on the planar surface of a substrate such as asemiconductor wafer or (ii) built with vertical structures.

The term “FinFET” refers to a FET that is formed over a fin that isvertically oriented with respect to the planar surface of a wafer.

“S/D” refers to the source and/or drain junctions that form twoterminals of a FET.

The term “vertical,” as used herein, means nominally perpendicular tothe surface of a substrate.

The expression “epitaxial layer” refers to a layer or structure ofsingle crystal material. Likewise, the expression “epitaxially grown”refers to a layer or structure of single crystal material.Epitaxially-grown material may be doped or undoped.

The term “nominal” as used herein refers to a desired, or target, valueof a characteristic or parameter for a component or a process operation,set during the design phase of a product or a process, together with arange of values above and/or below the desired value. The range ofvalues is typically due to slight variations in manufacturing processesor tolerances.

The term “substantially” as used herein indicates the value of a givenquantity varies by ±5% of the value.

The term “about” as used herein indicates the value of a given quantitythat can vary based on a particular technology node associated with thesubject semiconductor device. Based on the particular technology node,the term “about” can indicate a value of a given quantity that varieswithin, for example, 10-30% of the value (e.g., ±10%, ±20%, or ±30% ofthe value).

Replacement metal gate and high-k gate dielectrics are used in scaledplanar and FinFET-based devices for improved circuit performance. Forexample, metal gate electrodes and high-k gate dielectric layers (i.e.,gate dielectric layers having dielectric constant greater than 3.9) canrespectively replace polysilicon gate electrodes and silicon dioxidedielectric layers to achieve reduced gate leakage and improved drivecurrent. One process of implementing metal gates is termed a “gate last”or “replacement gate” process. Such processes include forming asacrificial polysilicon gate, performing various processes associatedwith the semiconductor device, removing the sacrificial gate to form atrench or opening, and depositing metal gate material in the trench oropening to form a metal gate.

Metal electrode layers having appropriate work function values are usedin the replacement gate process to provide a nominal transistorthreshold voltage. To that end, a variety of metal electrode layershaving a variety of work function values (e.g., near a conductionband-edge, near a valence band-edge, or near mid-gap) have beeninvestigated for application in a variety of device types (e.g., 2Dand/or 3D n-type/p-type FETs). Selection of work function materials forthe metal gate affects transistor threshold voltage V_(TH). A workfunction value is associated with the material composition of the workfunction layer, thus the material of the work function layer is chosento tune its work function so that the desired nominal threshold voltageV_(TH) is achieved. Work function metal may be p-type or n-type.

As technologies progress, integrated circuits are characterized bydecreasing dimension requirements over previous generation devices.However, there are challenges to implement such features and processes;for example, decreased critical dimensions of a photolithography processcan result in openings having a higher aspect ratio (i.e., depth towidth ratio of the opening). As an example, such high aspect ratioopenings can be formed during a metal gate replacement process after asacrificial gate structure is removed and prior to depositing gapfilling layers. During the deposition of gap filling layers, such aswork function layers and metal source/drain contacts, high aspect ratioscan be one of the reasons for pre-mature sealing and/or form defects inthe gap fill material. Defects can include voids and poor step coverage,which can be discontinuities in the deposited material on sidewall orbottom surfaces of the gap. The defects and poor step coverage can inturn lead to poor device performance.

Atomic layer deposition (ALD) processes are developed from a variety ofCVD processes to provide conformal thin film deposition. ALD processesfeature sequential alternating exposure of chemical precursors thatreacts with the substrate. In an ALD process, a first precursor ispulsed into a reaction chamber under vacuum for a predetermined amountof time to allow the first precursor to fully react with the substratesurface. Subsequently, the reaction chamber is purged with an inert gasto remove any unreacted precursor and reaction by-products. A secondprecursor is then pulsed into the reaction chamber to react with thereacted first precursor and form one or more atomic layers (collectivelycalled “a sublayer”) of the desired material. This process is thencycled until a nominal film thickness is achieved. Although ALDprocesses provide relatively conformal film deposition in a variety ofstructures and surfaces, for defects in high aspect ratio structures(e.g., greater than 6), such as voids, can still remain. For example, inhigh aspect ratio openings, the ALD process may deposit material fasterat the top corners rather than the bottom of the opening, resulting inoverhang at the top corners and may prematurely close the opening beforethe opening is completely filled.

Various embodiments in accordance with this disclosure provide methodsof forming conformal metal layers with improved step coverage (e.g.,substantially uniform and continuous coverage of material) in highaspect ratio openings (e.g., aspect ratios greater than 6). In someembodiments, the conformal layers formed using methods described in thepresent disclosure can include metal compound layers and metal layers;these layers are collectively described as “metal layers” forsimplicity. The conformal metal layers can be formed using a multi-cycledeposition and in-situ etching process. The formation process caninclude cycles of deposition processes and in-situ etching processes,such as a metallic halide etching (MHE) process. An MHE process is a dryetching process using chlorine-based or fluorine-based precursors in avacuum chamber. MHE processes can efficiently remove overhang at topcorners of an opening due to higher reactant molecular density and largecontact surface with reactant molecules at the top corners. The MHEprocess can be performed in-situ (e.g., performed in the same chamber asthe multi-cycle deposition process) between or at the end of depositioncycles to etch away excessive deposited material and form a conformalmetal layer. In some embodiments, the deposited metal layer can besubstantially conformal. In some embodiments, the deposited materiallayer can provide substantially uniform and continuous material coverageon the sidewall, bottom, and top surfaces of high aspect ratio openingsto achieve improved step coverage. In some embodiments, the multi-cycledeposition process can include an atomic layer deposition (ALD) process.In some embodiments, precursors used in the MHE process can includechlorine-based or fluorine-based metal precursors. Nominal thickness andquality of the conformal metal layers can be varied by adjusting atleast the deposition conditions, number of deposition cycles, choice ofprecursors for the MHE process, number of etching cycles, parameters ofthe MHE process, other suitable parameters, and/or combinations thereof.

In accordance with various embodiments of this disclosure, using thedeposition and in-situ etching process to form conformal gap fill layersin semiconductor structures provides, among other things, benefits of(i) high device reliability and threshold voltage performance due toimproved step coverage in high aspect ratio structures; (ii) reductionor elimination of the need for additional dry etching or wet etchingprocesses due to application of the MHE etching process; and (iii)reduction of contamination and cost by employing an in-situ etchingprocess.

It is noted that the present disclosure presents embodiments directed togate stack formation and related gate stack structures, which may beemployed in multiple technology nodes and in a variety of device types.In some embodiments, the conformal metal layers and methods for formingthe same can be incorporated in technology nodes of 7 nm or less. Forexample, embodiments described herein may also be applied in 3 nmtechnology nodes. In some embodiments, gate stacks can be suitable foruse in planar bulk metal-oxide-semiconductor field-effect transistors(MOSFETs), multi-gate transistors (planar or vertical) such as FinFETdevices, gate-all-around (GAA) devices, Omega-gate (Ω-gate) devices, orPi-gate (Π-gate) devices, as well as strained-semiconductor devices,silicon-on-insulator (SOI) devices, partially-depleted SOI devices,fully-depleted SOI devices, or other devices. In addition, embodimentsdisclosed herein may be employed in the formation of p-type and/orn-type devices. Other semiconductor structures may also benefit fromembodiments of the present disclosure, such as contacts andinterconnects.

It is also noted that the term “in-situ” is used to describe processesthat are performed while a device or wafer remains within a processingsystem (e.g., including a load lock chamber, transfer chamber,processing chamber, or any other processing chamber), and where forexample, the processing system allows the substrate to remain undervacuum conditions. As such, the term “in-situ” may also generally beused to refer to processes in which the device or substrate beingprocessed is not exposed to an external ambient (e.g., external to theprocessing system).

FIGS. 1-4 illustrate metal layer fabrication processes in varioussemiconductor devices based on embodiments of the multi-step depositionand MHE process method. The fabrication process can produce conformalmetal layers having improved step coverage (i.e., substantially uniformand continuous coverage of material) in high aspect ratio openings.Although fabrication processes of planar devices and multi-fin FinFETare described here as examples, the fabrication process can be appliedin various semiconductor structures, such as trenches or gaps with lowor high aspect ratios, single-fin FinFETs, and any other suitablesemiconductor structure. The fabrication processes provided here areexemplary, and alternative processes in accordance with this disclosuremay be performed that are not shown in these figures. Some embodimentsof the present disclosure provide methods for manufacturing n-type andp-type devices using a replacement gate process. For example,fabrication processes of n-MOS and p-MOS devices are introduced.

FIG. 1 shows a cross-sectional view of a semiconductor device 100incorporating metal gap fill layers, in accordance with someembodiments. In some embodiments, semiconductor device 100 is a planarn-MOS device. As discussed above, a replacement gate process includesforming an opening in an ILD layer after the sacrificial polysilicon isremoved. As shown in FIG. 1, a gate trench 111 is formed betweenopposing surfaces of ILD 109 and a top surface of semiconductorsubstrate 101. In FIG. 1, an n-type work function layer 105, a blockinglayer 106, and a metal layer 107 are collectively referred to herein as“a metal gate stack” and is positioned over a semiconductor substrate101. In FIG. 1, a high-k dielectric layer 103 and a barrier layer 104are lined between semiconductor substrate 101 and the metal gate stack.An optional spacer 110 is formed on sidewalls of the metal gate stack tofacilitate a subsequent source/drain alignment operation.

As shown in FIG. 1, the metal gate stack, high-k dielectric layer 103and optional spacer 110 are positioned within an interlayer dielectric(ILD) 109 in a lateral direction. In FIG. 1, a source/drain (S/D) 108 isformed in the semiconductor substrate 101, and a distance between thesource and the drain is gate length L_(g). In some embodiments, the gatelength L_(g) of semiconductor device 100 can be about 16 nm. In someembodiments, gate length L_(g) can be less than 16 nm. In someembodiments, gate length Lg can be greater than 16 nm. Gate height H asmeasured from a bottom of barrier layer 104 to a top surface of metallayer 107 can be between about 10 nm and about 120 nm. In someembodiments, a distance L_(A) between opposing sidewall surfaces ofhigh-k dielectric layer 103 can be between about 10 nm and about 20 nm.In some embodiments, a distance L_(B) between opposing sidewall surfacesof barrier layer 104 can be about 17 nm. In some embodiments, a distanceL_(C) between opposing sidewall surfaces of n-type work function layer105 can be about 2 nm. In some embodiments, a p-MOS device can have ap-type work function layer lined between barrier layer 104 and n-typework function layer 105. In such cases, a distance between opposingsidewall surfaces of p-type work function layer can be about 8 nm.

Semiconductor substrate 101 can be a bulk semiconductor substrate onwhich various layers and device structure are formed. In someembodiments, semiconductor substrate 101 can include silicon or acompound semiconductor, such as gallium arsenide (GaAs), indiumphosphide (InP), silicon germanium (SiGe), silicon carbide (SiC), othersuitable semiconductor materials, and/or combinations thereof. In someembodiments, various layers can be formed on semiconductor substrate101, such as dielectric layers, doped layers, polysilicon layers,conductive layers, other suitable layers, and/or combinations thereof.In some embodiments, various devices can be formed on semiconductorsubstrate 101, such as transistors, resistors, capacitors, othersuitable devices, and/or combinations thereof.

High-k dielectric layer 103 can be any suitable material havingdielectric constant greater than 3.9. For example, high-k dielectriclayer 103 can include a high-k dielectric such as hafnium oxide(HfO_(x)). In some embodiments, high-k dielectric layer 103 can includeother high-k dielectrics, such as lanthanum oxide (LaO), aluminum oxide(Al₂O₃), zirconium oxide (ZrO), titanium oxide (TiO), tantalum oxide(Ta₂O₅), yttrium oxide (Y₂O₃), strontium titanate (STO), barium titanate(BTO), hafnium silicate (HfSiO), silicon nitride (Si₃N₄), oxynitrides,any other suitable materials, and/or combinations thereof. High-kdielectric layer 103 can be formed by any suitable process such as ALD,chemical vapor deposition (CVD), metalorganic CVD (MOCVD), physicalvapor deposition (PVD), plasma enhanced CVD (PECVD), plasma enhance ALD(PEALD), thermal oxidation, any other suitable deposition techniques,and/or combinations thereof. In some embodiments, high-k dielectriclayer 103 can have a thickness between about 10 Å and about 20 Å.

Barrier layer 104 can formed over the high-k dielectric layer 103, inaccordance with some embodiments. Barrier layer 104 can function as abarrier to protect high-k dielectric layer 103 by preventing metaldiffusion. In some embodiments, barrier layer 104 can include titaniumnitride (TiN), tantalum nitride (TaN), any other suitable barrier layermaterial, and/or combinations thereof. Barrier layer 104 can be formedafter high-k dielectric layer 103 and formed using various depositiontechniques such as ALD, PVD, CVD, PECVD, other suitable depositionprocesses, and/or combinations thereof. In some embodiments, barrierlayer 104 can have a substantially uniform thickness between about 10 Åand about 30 Å.

In some embodiments, an MHE process can be used with an ALD depositionprocess to form a conformal barrier layer 104 having improved stepcoverage. In some embodiments, MHE processes can be used with othersuitable deposition processes to provide improved step coverage. In someembodiments, an ALD process used to produce a barrier layer containingTiN can include pulsing a first precursor of ammonia (NH₃) into areaction chamber under vacuum for a predetermined amount of time toallow the NH₃ to fully react with the substrate surface. Subsequently, afirst purging process using an inert gas such as nitrogen or argon isperformed in the reaction chamber to remove any unreacted NH₃ andreaction by-products. A second precursor of titanium tetrachloride(TiCl₄) is then pulsed into the reaction chamber to allow surfacereaction with the first precursor and form one or more atomic layers ofTiN. In some embodiments, pentakis-dimethylamino tantalum (PDMAT) can beused as the second precursor. A second purging process is performed inthe reaction chamber to remove any unreacted TiCl₄ and any reactionby-products. For simplicity purposes, a single deposition cycle can bedefined as including the above-described two pulsing and two purgingprocesses. This deposition cycle is then repeated until a nominal filmthickness of TiN is achieved. In some embodiments, MHE processes can beperformed after one or more deposition cycles such that overhang can bereduced before a subsequent deposition cycle begins. For example, an MHEprocess can be performed after the two pulsing and two purgingprocesses, in accordance with some embodiments. The MHE process can alsobe performed in intervals after a certain number of deposition cycles.In some embodiments, MHE processes can be performed after a finalnominal film thickness is achieved and prior to the deposition processof a different material. The MHE process can efficiently remove overhangformed during the deposition cycle due to greater reactant moleculardensity at the top of the openings as compared to the bottom surface ofthe openings.

In some embodiments, the chlorine-based or fluorine-based metalprecursor for the MHE process can include tungsten fluoride (WF_(x)),tungsten chloride (WCl_(x)), titanium chloride (TiCl_(x)), titaniumfluoride (TiF_(x)), tantalum chloride (TaCl_(x)), where ‘x’ can bebetween about 1 and about 6. Any other suitable precursors can be used.The deposition cycle and the MHE process can be performed in-situ, forexample, performed within a processing system such as an ALD clustertool. The MHE process can be performed at a temperature between about200° C. to about 1000° C. The precursors of the MHE process can bepulsed into the reaction chamber at a flow rate of about 100-12000standard cubic centimeters per minute (sccm). The processing pressurefor the MHE process can be between about 1 Torr and about 20 Torr. TheMHE process can be performed for a period of time between about 10 s andabout 300 s. In some embodiments, plasma is not activated during the MHEprocess. In some embodiments, the MHE processes between depositioncycles can be performed for substantially the same amount of time. Insome embodiments, the MHE processing time can be different betweendeposition cycles. The processing conditions (e.g., including selectionof the chlorine-based or fluorine-based metal precursors, deposition andMHE processing temperatures, and flow rates of the chlorine-based orfluorine-based metal precursor) can be selected so as to induce athermal chemical reaction between the precursors and the MHE process,such that as a result of the etching process, excessive material at thetop corners of the opening is removed and improved step coverage isachieved. In some embodiments, metal residual of the precursor used inthe MHE process can remain within the deposited film. In someembodiments, the metal element of the chlorine-based or fluorine-basedmetal precursor can remain in the formed material after each MHEprocess. For example, W, Ta, or Ti residue can remain in the formedbarrier layer 104. After each MHE process, metal residue can remain onthe surface of the etched film. During the process where the MHE processis performed in-situ between deposition cycles and before a final filmthickness is reached, the residual metal element may be embeddedthroughout the thickness of the final film, depending on the frequencyand etch duration of the MHE process. For example, the residual metalelement may be embedded at a depth between 10% and 90% of the thicknessof the deposited film. In some embodiments, the MHE process is performedin-situ after each deposition cycle until a nominal final thickness isreached, and the residual metal element is formed throughout thethickness of the deposited film. In some embodiments, the MHE process isperformed in-situ during a portion of the total deposition cycles. Forexample, the MHE process can be performed during the first 10% of thedeposition cycles of the total deposition cycles. In such scenarios, theresidual metal element may be embedded between 0% to 10% thickness ofthe final deposited film. It should be noted that residual metal elementcan be formed at the interface during deposition cycles where the MHEprocess has been applied, therefore the residual metal element can beformed at any suitable thickness of the deposited film. In someembodiments, the MHE process is performed in-situ after a final filmthickness has been achieved. In such scenarios, the residual metalelement may penetrate from the exposed surface of the final film intothe film by a penetration depth. For example, the residual metal elementmay penetrate up to about 10% thickness from the surface of the finalfilm, according to some embodiments. In some embodiments, the metalresidual can be formed of metal elements used in the chlorine-based andfluorine-based metal precursors.

N-type work function layer 105 is deposited on barrier layer 104, inaccordance with some embodiments. N-type work function layer 105provides an appropriate work function value to achieve a nominaltransistor threshold voltage for semiconductor device 100. In someembodiments, semiconductor device 100 can include one or more workfunction layers to achieve the nominal threshold voltage. A conformalwork function layer with improved step coverage can provide high devicereliability and threshold voltage performance. In some embodiments,n-type work function layer 105 can include aluminum-doped titaniumcarbide (TiAlC), aluminum-doped tantalum carbide (TaAlC), titaniumsilicon carbide (TiSiC), any other suitable n-type work function layermaterial, and/or combinations thereof. N-type work function layer 105can be formed after barrier layer 104 and formed using variousdeposition techniques such as ALD, PVD, CVD, PECVD, other suitabledeposition processes, and/or combinations thereof. In some embodiments,n-type work function layer 105 can have a substantially uniformthickness between about 10 Å and about 50 Å.

In some embodiments, an MHE process can be used with an ALD depositionprocess to form a conformal n-type work function layer 105 havingimproved step coverage. In some embodiments, the MHE process can be usedwith other suitable deposition processes such as CVD or PVD to provideimproved step coverage. In some embodiments, an ALD process used toproduce an n-type work function layer containing TiAlC can includeflowing a first precursor of TiCl₄ into a reaction chamber under vacuumfor a predetermined amount of time to allow the first precursor to fullyreact with the substrate surface. Subsequently, a first purging processusing an inert gas, such as nitrogen or argon, is performed in thereaction chamber to remove any unreacted TiCl₄ and reaction by-products.A second precursor such as triethylaluminum (TEA) is then flowed intothe reaction chamber to allow a surface reaction with the firstprecursor and form one or more atomic layers of TiAlC. A second purgingprocess is performed in the reaction chamber to remove any unreacted TEAand any reaction by-products. The deposition cycle is then repeateduntil a nominal film thickness of TiAlC is achieved.

In some embodiments, the MHE process can be performed after one or moredeposition cycles such that overhang can be reduced before thesubsequent deposition cycle begins. For example, the MHE process can beperformed after each deposition cycle, in accordance with someembodiments. The MHE process can also be performed in intervals after acertain number of deposition cycles. In some embodiments, MHE processescan be performed after a final nominal film thickness is achieved andprior to the deposition process of a different material. The MHE processcan efficiently remove overhang formed during the deposition cycle dueto greater ion density at the top of the openings (e.g., trenches orvias) compared to the bottom surface of the openings.

In some embodiments, the chlorine-based or fluorine-based metalprecursor for an MHE process can include tungsten chloride (WCl_(x)),tin chloride (SnCl_(x)), niobium chloride (NbCl_(x)), molybdenumchloride (MoCl_(x)), titanium fluoride (TiF_(x)), where ‘x’ can bebetween about 1 and about 6. In some embodiments, any other suitableprecursors can be used. The deposition cycle and the MHE process can beperformed in-situ. In some embodiments, the metal element of thechlorine-based or fluorine-based metal precursor can remain in theformed material. For example, W, Sn, Nb, Mo, or Ti atoms can remain inthe formed n-type work function layer 105. In some embodiments, theprocessing conditions of the MHE process can be similar to theprocessing conditions used in the MHE process during the formation ofbarrier layer 104. For example, processing conditions such astemperature, precursor flow rates, chamber pressure, processing time,plasma condition, number of cycles, sequence of cycles, and otherprocessing conditions can be similar between the aforementioned MHEprocesses. In some embodiments, the processing conditions can bedifferent.

As discussed above, FIG. 1 illustrates semiconductor device 100 as aplanar n-MOS device. In some embodiments, semiconductor device 100 canalso be a planar p-MOS device. A p-MOS device may include a p-type workfunction layer formed prior to the deposition of n-type work functionlayer 105 and is not shown in FIG. 1 for simplicity. In someembodiments, the p-type work function layer can be formed after thedeposition of n-type work function layer 105 and before forming blockinglayer 106. A p-type work function material deposition process combinedwith an in-situ MHE process can also provide conformal p-type workfunction material deposition and improved step coverage.

The combined n-type and p-type work function layers can provide anappropriate work function value to achieve a nominal transistorthreshold voltage for p-MOS devices. In some embodiments, the p-MOSdevice can include more than two work function layers to achieve anominal threshold voltage. In some embodiments, p-type work functionlayer can include TiN, high-k capping TiN, any other suitable workfunction layer material, and/or combinations thereof. A p-type workfunction layer can be formed after an n-type work function layer and canbe formed using various deposition techniques, such as ALD, PVD, CVD,PECVD, other suitable deposition processes, and/or combinations thereof.In some embodiments, the metal element of the chlorine-based orfluorine-based metal precursor can remain in the formed material. Insome embodiments, p-type work function layer can have a substantiallyuniform thickness between about 5 Å and about 50 Å. The MHE process forforming the p-type work function layer can include precursors usingWCl_(x), TaCl_(x), SnCl_(x), NbCl_(x), where ‘x’ can be between about 1and about 6. In some embodiments, any other suitable precursors can beused. In some embodiments, the processing conditions of the MHE processin a p-type work function layer formation process can be similar tothose in the formation process of n-type work function layer 105. Insome embodiments, the processing conditions can be different.

Blocking layer 106 can be formed on n-type work function layer 105, inaccordance with some embodiments. Blocking layer 106 may be formed on ap-type work function layer, in accordance with some embodiments.Blocking layer 106 can be formed on the work function layers in anin-situ manner, preventing the underlying work function layer fromcontamination or oxidation. Blocking layer 106 can include TiN, TaN,TSN, any other suitable material, and/or combinations thereof. In someembodiments, blocking layer 106 can have a thickness ranging from about5 Å to about 40 Å. Blocking layer 106 can be formed by variousdeposition techniques, such as ALD, PVD, CVD, PECVD, or any othersuitable techniques. In some embodiments, blocking layer 106 can be anoptional layer that can be removed.

Similar to the deposition process of barrier layer and work functionlayers, a blocking layer deposition process combined with an in-situ MHEprocess can also provide conformal blocking material deposition andimproved step coverage. In some embodiments, the MHE process for formingblocking layer 106 can include precursors, such as WCl_(x), SnCl_(x),NbCl_(x), MoCl_(x), TiF_(x), where ‘x’ can be between about 1 and about6. Any other suitable precursors can be used. In some embodiments, themetal element of the chlorine-based or fluorine-based metal precursorcan remain in the formed material. For example, W, Sn, Nb, Mo, or Tiatoms can remain in the formed blocking layer 106. In some embodiments,the processing conditions of the MHE process in a blocking layerformation process can be similar to those in the formation process ofn-type work function layer 105. The processing conditions can bedifferent.

In some embodiments of the present disclosure, metal layer 107 is formedto fill in a remainder of a gate trench in the metal gate stack. Metallayer 107 can include any metal material suitable for forming a metalgate or portion thereof. For example, metal layer 107 can includetungsten. In some embodiments, metal layer 107 can be formed usingtungsten nitride (WN), TaN, ruthenium, silver, aluminum, any othersuitable material, and/or combinations thereof. In some embodiments,metal layer 107 can be formed using a damascene process followed by aplanarization process (e.g., a chemical mechanical polishing process) toremove any excessive material formed on the top surface of ILD 109.

In some embodiments, ILD 109 can include a dielectric material. In someembodiments, the dielectric material can include silicon oxide, siliconnitride, silicon oxynitride, spin-on glass (SOG), fluorinated silicaglass (FSG), carbon doped silicon oxide (e.g., SiCOH), amorphousfluorinated carbon, Parylene, bis-benzocyclobutenes, polyimide, otherproper porous polymeric materials, other suitable dielectric materials,and/or combinations thereof. In some embodiments, ILD 109 can include ahigh density plasma (HDP) dielectric material (e.g., HDP oxide) and/or ahigh aspect ratio process (HARP) dielectric material (e.g., HARP oxide).ILD 109 can also include one or more dielectric materials and/or one ormore dielectric layers. ILD 109 can be planarized by achemical-mechanical-polishing process until a top portion of the metalgate stack is exposed as illustrated in FIG. 1. The CMP process includesa high selectivity to provide a substantially planar surface for themetal gate stack, spacers 110, and ILD 109. In some embodiments, the CMPprocess has low dishing and/or metal erosion effect.

In some embodiments, in addition to the layers described above,semiconductor device 100 may further include liner layers, interfaciallayer, seed layers, adhesion layers, barrier layers, or theirequivalents.

FIGS. 2-3B illustrate various views of a metal gate FinFET structure200. As shown in FIGS. 3A and 3B, metal gate FinFET structure 200 caninclude barrier layers, work function layers, and blocking layers formedin high aspect ratio openings using the multi-cycle deposition and MHEetching process (described above) to produce a conformal film depositionwith improved step coverage. As an example, metal gate FinFET structure200 illustrated in the present disclosure can be an n-type FinFET havingone or more n-type work function layers. It should be noted that metalgate FinFET structure 200 can also include a p-type FinFET with one ormore n-type and p-type work function layers formed using the multi-cycledeposition and MHE processes to provide conformal film thickness andimproved step coverage.

Referring to FIG. 2, a perspective view of metal gate FinFET structure200 is shown. Two semiconductor fins 213 are positioned on a substrate201 and are separated by shallow trench isolation 215. Semiconductor fin213 can be formed of silicon, silicon-germanium, germanium, or othersuitable semiconductor materials. A metal gate 205G is formed over topsurface 213A and sidewalls 213B of semiconductor fins 213. A channel ofFinFET structure 200 (not shown) is defined along top surface 213A andsidewalls 213B of semiconductor fin 213 and extended betweensource/drain (S and D) in the semiconductor fin 213. As shown in FIG. 2,ILD 209 is formed over top surface 213A and sidewalls 213B at the S/Dportions of the semiconductor fins 213. Shallow trench isolation 215 isformed on substrate 201 and between adjacent semiconductor fins 213.Metal gate can be formed using a replacement gate process where asacrificial polysilicon gate structure is removed from ILD 209, leavingan opening where a metal gate structure can be deposited. In someembodiments, the opening can be a high aspect ratio opening having anaspect ratio between about 6 and about 60.

Semiconductor substrate 201 can be a bulk semiconductor substrate onwhich various layers and device structures are formed. In someembodiments, semiconductor substrate 201 can be similar to semiconductorsubstrate 101 as described above in FIG. 1 and is not repeated here forsimplicity. In some embodiments, semiconductor substrate 201 can bedifferent from semiconductor substrate 101. In some embodiments, variouslayers and devices can be formed on semiconductor substrate 201. Forexample, dielectric layers, doped layers, polysilicon layers, conductivelayers, other suitable layers, and/or combinations thereof. Multipledevices can be interconnected through an interconnect layer toadditional integrated circuits.

Referring to FIG. 3A and FIG. 3B, two cross-sectional views of metalgate FinFET structure 200 are shown. The cross section shown in FIG. 3Ais viewed from a first direction of metal gate FinFET structure 200 ofFIG. 2. The first direction is cut through semiconductor fin 213 andparallel to a longitudinal axis of semiconductor fin 213 and is denotedas “A-A′.” The cross section shown in FIG. 3B is viewed from a seconddirection of metal gate FinFET structure 200 of FIG. 2. The seconddirection is through shallow trench isolation 215 and also parallel to alongitudinal axis of semiconductor fin 213 and is denoted as “B-B′.”Gate trench 211 is formed between opposing surfaces of ILD 209 and topsurface 213A of semiconductor fin 213 as shown in FIG. 3A or betweenopposing surfaces of ILD 209 and top surface of shallow trench isolation215 as shown in FIG. 3B. An optional spacer 310 is formed on sidewallsof the metal gate stack to facilitate a subsequent source/drainalignment operation. Spacer 310 can be similar to spacer 110 describedabove in FIG. 1 and is not described in detail here for simplicity.

In FIG. 3A, metal gate stack 205G is positioned on semiconductor fin 213and in gate trench 211. Metal gate stack 205G can include barrier layer204, n-type work function layer 205, blocking layer 206, and metal layer207. A gate length L_(g) is measured along top surface 213A ofsemiconductor fin 213 and extended between a source (S) and a drain (D)in semiconductor fin 213. In some embodiments, the gate L_(g) in metalgate FinFET structure 200 is less than about 16 nm. In some embodiments,the gate L_(g) can be greater than about 16 nm. A height H1 of metalgate stack 205G is a length measured from a leveled top surface of metallayer 207 to a bottom surface of barrier layer 204. In some embodiments,the height H1 of metal gate stack 205G can be from about 20 nm to about120 nm. A distance L1 between opposing surfaces of high-k dielectriclayer 203 can be between about 10 nm and about 20 nm. In someembodiments, an aspect ratio of metal gate stack 205G can be in a rangeof from about 6 to about 12. The aspect ratio of metal gate stack 205Grefers to a ratio of height H over distance L1. The greater the aspectratio of the gate trench, the greater the difficulty of depositingsubstantially uniform films with improved step coverage. In someembodiments, a distance between opposing surfaces of barrier layer 204can be about 17 nm. In some embodiments, a distance between opposingsurfaces of n-type work function layer 205 can be about 2 nm. In someembodiments, a p-type FinFET structure can have a p-type work functionlayer lined between barrier layer 204 and n-type work function layer205. In such cases, a distance between opposing surfaces of p-type workfunction layer can be about 8 nm.

High-k dielectric layer 203 can be any suitable material havingdielectric constant greater than 3.9. High-k dielectric layer 203 can besimilar to high-k dielectric layer 103 described above in FIG. 1 and isnot described in detail here for simplicity. In some embodiments, high-kdielectric layer 203 can include a high-k dielectric, such as hafniumoxide (HfO_(x)). High-k dielectric layer 203 can be formed using asimilar process used to form high-k dielectric layer 103. In someembodiments, high-k dielectric layer 203 can be formed using a differentdeposition process. In some embodiments, high-k dielectric layer 203 canhave a thickness between about 10 Å and about 20 Å.

Barrier layer 204 can be formed over high-k dielectric layer 203, inaccordance with some embodiments. Barrier layer 204 can be similar tobarrier layer 104 as described above in FIG. 1 and is not described indetail here for simplicity. In some embodiments, barrier layer 204 caninclude TiN, TaN, any other suitable barrier layer material, and/orcombinations thereof. Barrier layer 204 can be formed after high-kdielectric layer 203 and formed using various deposition techniques,such as ALD, PVD, CVD, PECVD, other suitable deposition processes,and/or combinations thereof. In some embodiments, barrier layer 204 canhave a substantially uniform thickness between about 10 Å and about 30Å. Similar to forming barrier layer 104, an MHE process can be used withan ALD deposition process to form a conformal barrier layer 204 havingimproved step coverage. In some embodiments, the MHE process for formingbarrier layer 204 can be similar to the MHE process for forming barrierlayer 104 and is not described in detail here for simplicity. In someembodiments, the deposition or MHE processes can be different.

N-type work function layer 205 is deposited on barrier layer 204, inaccordance with some embodiments. N-type work function layer 205 can besimilar to n-type work function layer 105 described above in FIG. 1 andis not described in detail here for simplicity. In some embodiments,n-type work function layer 205 can include TiAlC, TaAlC, TiSiC, anyother suitable barrier layer material, and/or combinations thereof.N-type work function layer 205 can be formed using various depositiontechniques, such as ALD, PVD, CVD, PECVD, other suitable depositionprocesses, and/or combinations thereof. N-type work function layer 205can have a substantially uniform thickness between about 10 Å and about50 Å. In some embodiments, an MHE process can be used with an ALDdeposition process to form a conformal n-type work function layer 205having improved step coverage. In some embodiments, deposition processesand MHE processes used to form n-type work function layer 205 can besimilar to the corresponding processes used to form n-type work functionlayer 105 and are not described in detail here for simplicity.

Although FIG. 3A illustrates metal gate FinFET structure 200 as ann-type device, metal gate FinFET structure 200 can also include a p-typedevice. The p-type device can include a p-type work function layerformed prior to the deposition of n-type work function layer 205 and isnot shown in FIG. 3A for simplicity. A p-type work function materialdeposition process combined with an in-situ MHE process can also provideconformal p-type work function material deposition and improved stepcoverage. The formation of such p-type work function layer can besimilar to the p-type work function layer described above with referenceto FIG. 1 and is not described here in detail for simplicity.

Blocking layer 206 can be formed on n-type work function layer 205, inaccordance with some embodiments. Blocking layer 206 can also be formedon a p-type work function layer in a p-type FinFET, in accordance withsome embodiments. Blocking layer 206 can be formed using a similardeposition and MHE process as blocking layer 106 described above in FIG.1 and is not described in detail here for simplicity. In someembodiments, the processing conditions can be different. In someembodiments, the blocking layer 206 is an optional layer.

Metal layer 207 can be formed to fill in a remainder of a gate trench inmetal gate stack 205G. Metal layer 207 can be similar to metal layer 107as described above in FIG. 1 and is not described here in detail forsimplicity. In some embodiments, metal layer 207 can include tungsten.In some embodiments, metal layer 207 can be formed using WN, TaN,ruthenium, silver, aluminum, any other suitable material, and/orcombinations thereof. In some embodiments, metal layer 207 can be formedusing a damascene process followed by a planarization process to removeany excessive material formed on the top surface of ILD 209.

In some embodiments, ILD 209 can include a dielectric material. In someembodiments, ILD 209 can be similar to ILD 109 as described above inFIG. 1 and is not described in detail here for simplicity. ILD 209 canbe planarized by a chemical mechanical polishing process until a topportion of metal gate stack 205G is exposed as illustrated in FIG. 3A.

The cross section shown in FIG. 3B is cut from a second direction shownin FIG. 2. The second direction is cut through shallow trench isolation215 and in parallel to a longitudinal axis of semiconductor fin 213 andis denoted as “B-B′.” Elements with the same numeral labels in FIGS. 2,3A, and 3B are directed to the same structure of materials and are notrepeated here for simplicity. Shallow trench isolation 215 can be usedto provide electrical insulation between adjacent devices and can beformed using low-k dielectric material (e.g., dielectric material havingdielectric constant lower than 3.9). A gate height H2 in FIG. 3B ismeasured from a top surface of metal layer 207 to a bottom surface ofbarrier layer 204. Gate height H2 can be greater than gate height H1 ofFIG. 3A because gate height H2 includes the height of both gate heightH1 and also thickness of ILD 209 that is between top surface 213A ofsemiconductor fin 213 and top surface of high-k dielectric layer 203.Therefore, the gate trench formed in ILD 209 as viewed in FIG. 3B duringthe gate replacement process can have a higher aspect ratio than thegate trench in FIG. 3A. For example, the aspect ratio can be betweenabout 6 and about 60. In some embodiments, the height H2 of the metalgate stack can be from about 120 nm to about 600 nm. A distance L1between opposing surfaces of high-k dielectric layer 203 can be betweenabout 10 nm to about 20 nm. As described above, the multi-cycledeposition process and MHE process can produce conformal film withimproved step coverage in high aspect ratio openings, such as theopening formed during the gate replacement press illustrated in FIG. 3B.

Referring to FIG. 4, a configuration of a semiconductor wafermanufacturing system 400 used to form the work function layers in ametal gate semiconductor device is illustrated. The semiconductor wafermanufacturing system 400 has several growth chambers arranged in each ofthe two clusters 400A and 400B. Semiconductor wafer manufacturing system400 may also include other growth chambers for depositing dielectriclayers, barrier layers, blocking layers, adhesion layers,anti-reflecting layers, and any other suitable layers. Each layer in themetal gate structures described above in FIGS. 1-3B can be formed insemiconductor wafer manufacturing system 400 without exposing the waferto ambient contact between deposition processes.

Two load lock chambers 413A and 413B are configured to receive a wafertransferred from a load port 402. Load lock chambers 413A and 413B arevented to a pressure equivalent to the load port 402 while a wafer istransferred between load port 402 and load lock chambers 413A or 413B.When moving the wafer from load lock chamber 413A or 413B into one ofthe chambers in semiconductor wafer manufacturing system 400, load lockchambers 413A and 413B are pumped down to a certain degree of vacuumthat is closer to the vacuum level inside the clusters 400A and 400B.Clusters 400A and 400B each has at least one mechanical means such as arobot arm 404 or 408 which transfers the wafer parked in the pumped-download lock chamber 413A or 413B to one of the growth chambers.Semiconductor wafer manufacturing system 400 can also include degassingchambers 415 and 417 that are used to activate and remove gaseous and/orliquid substances, such as moisture and oxygen from substrates toprevent change in thin film characteristics and cause depositionfailure.

In some embodiments, a dielectric deposition chamber 401 is attached tocluster 400A and is loaded with precursors for high-k dielectric growth.For example, to deposit high-k dielectric layers 103 and 203 asillustrated in FIGS. 1 and 2 respectively, precursors such as hafniumtetrachloride (HfCl₄), water (H₂O), and any other suitable precursorsare provided to deposition chamber 401.

In some embodiments, a barrier layer deposition chamber 403 is attachedto cluster 400A and is connected to precursor supplies for barrier layergrowth. For example, deposition chamber 403 can be loaded withprecursors for multi-cycle deposition and MHE processes used to formconformal barrier layers with improved step coverage. The precursors canbe in a gas form. Deposition chamber 403 can be operated with or withoutactivated plasma during the MHE process. In some embodiments, depositionchamber 403 can be an ALD deposition chamber that can also performin-situ MHE processes. In some embodiments, deposition chamber 403 canbe maintained at a temperature between room temperature and about 200°C. In some embodiments, deposition chamber 403 can be maintained at atemperature between about 200° C. and about 1000° C. In someembodiments, deposition chamber 403 can be maintained at a chamberpressure between about 1 Torr and about 20 Torr during an MHE process.In some embodiments, barrier layer deposition chamber 403 can beconnected to supplies for precursors, such as WCl_(x), WF_(x), TaCl_(x),TiCl_(x), NH₃, PDMAT, and/or any other suitable precursors, where ‘x’can be between about 1 and about 6.

In some embodiments, an n-type work function layer deposition chamber405 is attached to cluster 400B and is connected to precursor suppliesfor n-type work function layer deposition. For example, depositionchamber 405 can be loaded with precursors for multi-cycle deposition andMHE processes used to form n-type work function layers. In someembodiments, the precursors can be in gas form. In some embodiments,deposition chamber 405 can be an ALD deposition chamber that can alsoperform in-situ MHE processes. In some embodiments, deposition chamber405 can be maintained at a temperature between room temperature andabout 200° C. In some embodiments, deposition chamber 405 can bemaintained at a temperature between about 200° C. and about 1000° C. Insome embodiments, deposition chamber 405 can be maintained at a chamberpressure between about 1 Torr and about 20 Torr during an MHE process.In some embodiments, n-type work function layer deposition chamber 405can be connected to supplies for precursors, such as WCl_(x), SnCl_(x),NbCl_(x), MoCl_(x), TEA, and/or any other suitable precursors, where ‘x’can be between about 1 and about 6.

In some embodiments, a p-type work function layer deposition chamber 407is attached to cluster 400B and is connected to precursor supplies forp-type work function layer deposition. For example, deposition chamber407 can be loaded with precursors for multi-cycle deposition and MHEprocesses used to form p-type work function layers. In some embodiments,deposition chamber 407 can be an ALD deposition chamber that can alsoperform in-situ MHE processes. In some embodiments, deposition chamber407 can be maintained at a temperature between room temperature andabout 200° C. In some embodiments, deposition chamber 407 can bemaintained at a temperature between about 200° C. and about 1000° C. Insome embodiments, deposition chamber 407 can be maintained at a chamberpressure between about 1 Torr and about 20 Torr during an MHE process.In some embodiments, n-type work function layer deposition chamber 407can be connected to supplies for precursors, such as WCl_(x), SnCl_(x),NbCl_(x), MoCl_(x), TEA, and/or any other suitable precursors, where ‘x’can be between about 1 and about 6.

In some embodiments, a blocking layer deposition chamber 409 is attachedto cluster 400B and is connected to precursor supplies for blockinglayer deposition. For example, deposition chamber 409 can be loaded withprecursors for multi-cycle deposition and MHE processes used to formblocking layers. In some embodiments, deposition chamber 409 can be anALD deposition chamber that can also perform in-situ MHE processes. Insome embodiments, deposition chamber 409 can be maintained at atemperature between room temperature and about 200° C. In someembodiments, deposition chamber 409 can be maintained at a temperaturebetween about 200° C. and about 1000° C. In some embodiments, depositionchamber 409 can be maintained at a chamber pressure between about 1 Torrand about 20 Torr during an MHE process. In some embodiments, blockinglayer deposition chamber 409 can be connected to supplies forprecursors, such as WClx, SnClx, NbClx, MoClx, TiClx, and/or any othersuitable precursors, where ‘x’ can be between about 1 and about 6.

In some embodiments, cooling chambers 410A and 410B allow a wafer tocool down to a desired temperature at an appropriate cooling rate inbetween various thin film growths without ambient contact. In someembodiments, additional chambers can be included in semiconductor wafermanufacturing system 400 for depositing any suitable material used toform the semiconductor structures described above in FIGS. 1-3B. Forexample, metal layer deposition chambers can be included insemiconductor wafer manufacturing system 400 for depositing metal layers107 and 207 that fills the gate trench. Metal layer deposition chamberscan be connected to precursor supplies, such as tungsten or cobalttarget and can be introduced with argon gas.

During the deposition of conformal layers in the deposition chambers ofsemiconductor wafer manufacturing system 400, the deposition chambersare kept under vacuum between the multi-cycle deposition processes andthe MHE processes, such that no ambient contact or contamination isintroduced. A user may enter a single recipe into a computer processorto control the deposition chamber for performing both the multi-cycledeposition and MHE process. For example, the recipe can includedeposition parameters for the first and second precursors in themulti-cycle deposition process, such as pulsing time, purging time, gasflow rate, chamber temperature, chamber pressure, plasma power,substrate bias, and/or any suitable deposition parameters. The recipecan also include processing parameters for the MHE process, such asprecursor types, precursor flow rate, chamber pressure, chambertemperature, processing time, and/or any suitable processing parameters.Therefore, the entire deposition process for a conformal layer can becontrolled by a single recipe in the same chamber.

Each wafer is assigned with a sequence of operations according to anoperating recipe to achieve automatic wafer processing in semiconductorwafer manufacturing system 400. In some embodiments, a substrate isfirst transferred from load lock chamber 413A and/or 413B to cluster400A using robot arm 404. The wafer can be sent into chamber 415 or 417for degassing and then to high-k dielectric layer deposition chamber 401for dielectric layer deposition. For example, high-k dielectric layers103 and 203 described above can be deposited in gate trenches usingdeposition chamber 401. In some embodiments, after a high-k dielectriclayer is formed, the wafer can be then transferred from chamber 401 todeposition chamber 403 for the growth of barrier layer 104 or 204. Insome embodiments, a barrier layer is optional and the wafer can betransferred from deposition chamber 401 to one of the depositionchambers in cluster 400B for subsequent depositions. For example, thewafer can be transferred to n-type work function layer depositionchamber 405 to deposit an n-type work function layer, in accordance withsome embodiments. After the deposition of an n-type work function layer,the wafer can be transferred to p-type work function layer depositionchamber 407 for forming a p-type work function layer used in a p-typedevice such as a p-MOS or p-type FinFET, in accordance with someembodiments. After the work function layers are deposited, the wafer canthen be transferred to blocking layer deposition chamber 409, ifnecessary. A metal layer used to fill gate trenches can also bedeposited in semiconductor wafer manufacturing system 400, in accordancewith some embodiments. After the metal layers are formed, the wafer canthen be parked to load lock chambers 413A and 413B using robot arms 404and 408. The vacuum level inside the load lock chambers chamber 413A and413B are raised to a level comparable to load port 402, and the wafer isthen transferred to load port 402 and taken out for subsequentoperations. For example, after the formation of the metal gatestructure, the wafer containing MOSFET or FinFET structures can undergoadditional CMOS processing to form various devices. In some embodiments,the various features include, but is not limited to, lightly dopedsource/drain regions (n-type and p-type LDD), source/drain (S/D)regions, silicide features, and a contact etch stop layer (CESL). Itshould be noted that strained structures such as silicon germanium(SiGe) and silicon carbide (SiC) features may be formed in the p-typeand/or n-type devices, respectively.

FIG. 5 is a flow diagram of an exemplary method 500 of forming conformallayers with improved step coverage in semiconductor structures, inaccordance with some embodiments of the present disclosure. It should benoted that operations of method 500 can be performed in a differentorder and/or vary, and method 500 may include more operations and arenot described for simplicity. It should also be noted that exemplarymethod 500 can also be used to form conformal layers having improvedstep coverage in contacts, vias, and/or interconnects. FIGS. 6A-6F arecross-sectional views of fabricating an exemplary semiconductorstructure 600 utilizing an in-situ MHE process for forming conformallayers with improved step coverage. FIGS. 6A-6F are provided asexemplary cross-sectional views to facilitate in the explanation ofmethod 500. Semiconductor structure 600 can include shallow trenchisolation 615, ILD 609, and spacer 610 which are respectively similar toshallow trench isolation 215, ILD 209, and spacer 310 as described abovein FIGS. 2-3B and are not described in detail here for simplicity. Insome embodiments, shallow trench isolation 615 can be a portion of asemiconductor substrate.

At operation 502, high-k dielectric layers are deposited in openings ofa semiconductor device, in accordance with some embodiments of thepresent disclosure. The openings can be a high aspect ratio (e.g.,greater than 6) opening, such as gate trenches, vias, interconnects, andother high aspect ratio openings. Referring to FIG. 6A, a gate trench602 is formed between exposed sidewall and bottom surfaces of high-kdielectric layer 603. Gate trench 602 can have a high aspect ratio(e.g., between about 6 and about 66) measured by dividing its height Hby its width L. High-k dielectric layers can be deposited on sidewallsand bottom of gate trench 602. An example of a high-k dielectric layeris high-k dielectric layer 603 shown in FIG. 6A. High-k dielectriclayers can be any suitable material having a dielectric constant greaterthan 3.9. For example, the high-k dielectric layers can include a high-kdielectric, such as HfO_(x). In some embodiments, the high-k dielectriclayer can include other high-k dielectrics, such as LaO, Al₂O₃, ZrO,TiO, Ta₂O₅, Y₂O₃, STO, BTO, HfSiO, Si₃N₄, oxynitrides, any othersuitable materials, and/or combinations thereof. High-k dielectriclayers can be formed by any suitable process, such as ALD, CVD, MOCVD,PVD, PECVD, PEALD, thermal oxidation, any other suitable depositiontechniques, and/or combinations thereof. In some embodiments, the high-kdielectric layer can have a thickness between about 10 Å and about 20 Å.Other examples of high-k dielectric layers can be high-k dielectriclayers 103 and 203 as described above in FIGS. 1 and 2.

At operation 504, barrier layers are deposited in openings of asemiconductor device, in accordance with some embodiments of the presentdisclosure. The openings can be a high aspect ratio (e.g., greater than6) opening, such as gate trenches, vias, interconnects, and other highaspect ratio openings. An example of a barrier layer is barrier layer604 formed on high-k dielectric layer 603, as shown in FIG. 6B. In someembodiments, the barrier layer can include TiN, TaN, any other suitablebarrier layer material, and/or combinations thereof. The barrier layercan be formed after the high-k dielectric layer and formed using variousdeposition techniques, such as ALD, PVD, CVD, PECVD, other suitabledeposition processes, and/or combinations thereof. In some embodiments,the barrier layer can have a substantially uniform thickness betweenabout 10 Å and about 30 Å.

In some embodiments, an MHE process can be used with an ALD depositionprocess to form a conformal barrier layer having improved step coverage.In some embodiments, MHE processes can be used with other suitabledeposition processes to provide improved step coverage. In someembodiments, the ALD process used to form the barrier layer can includepulsing a first precursor into a reaction chamber under vacuum for apredetermined amount of time. A first purging process using an inert gasis performed in the reaction chamber to remove any unreacted firstprecursor material and reaction by-products. A second precursor is thenpulsed into the reaction chamber to allow a surface reaction with thefirst precursor and form one or more atomic layers of barrier layermaterial. A second purging process is performed in the reaction chamberto remove any unreacted second precursor material and any reactionby-products. This deposition cycle is then repeated until a nominal filmthickness of barrier layer is achieved. In some embodiments, MHEprocesses can be performed after one or more deposition cycles such thatoverhang can be reduced before the subsequent deposition cycle begins.For example, an MHE process can be performed after each depositioncycle, in accordance with some embodiments. The MHE process can also beperformed in intervals after a certain number of deposition cycles. Insome embodiments, MHE processes can be performed after a final nominalfilm thickness is achieved and prior to the deposition process of adifferent material. The MHE process can efficiently remove overhangformed during the deposition cycle due to greater ion density at the topof the openings compared to the bottom of the openings.

In some embodiments, the chlorine-based or fluorine-based metalprecursor for an MHE process can include WF_(x), WCl_(x), TiCl_(x),TaCl_(x), where ‘x’ can be equal to about 1-6. In some embodiments, anyother suitable precursors can be used. In some embodiments, thedeposition cycle and the MHE process are performed in-situ, for example,performed within a processing system such as an ALD cluster tool. Insome embodiments, the processing conditions of the MHE process can besimilar to the processing conditions used in the MHE process during theformation of barrier layer 104. For example, processing conditions suchas temperature, precursor flow rates, chamber pressure, processing time,plasma condition, number of cycles, sequence of cycles, and otherprocessing conditions can be similar between the aforementioned MHEprocesses. In some embodiments, the processing conditions can bedifferent. Other examples of forming barrier layers using themulti-cycle deposition process and MHE process can be forming barrierlayers 104 and 204 as described above in FIGS. 1 and 2.

At operation 506, p-type work function layers are deposited in openingsof a semiconductor device, in accordance with some embodiments of thepresent disclosure. The openings can be a high aspect ratio (e.g.,greater than 6) opening, such as gate trenches, vias, interconnects, andother high aspect ratio openings. In some embodiments, semiconductortransistor device can be a p-type device including a p-type workfunction layer formed on an n-type work function layer. An example of ap-type work function layer is p-type work function layer 605 p formed onbarrier layer 604, as shown in FIG. 6C. A p-type work function materialdeposition process combined with an in-situ MHE process can also provideconformal p-type work function material deposition and improved stepcoverage. The combined n-type and p-type work function layers canprovide appropriate work function value to achieve a nominal transistorthreshold voltage for p-type devices. In some embodiments, p-type workfunction layer can include TiN, HKE-TiN, any other suitable workfunction layer material, and/or combinations thereof. P-type workfunction layer can be formed after n-type work function layer and formedusing various deposition techniques, such as ALD, PVD, CVD, PECVD, othersuitable deposition processes, and/or combinations thereof. In someembodiments, p-type work function layer can have a substantially uniformthickness between about 5 Å and about 50 Å. The MHE process for formingp-type work function layer can include precursors using WCl_(x),TaCl_(x), SnCl_(x), NbCl_(x), where ‘x’ can be between about 1 and about6. In some embodiments, any other suitable precursors can be used. Insome embodiments, the processing conditions of the MHE process in ap-type work function layer formation process can be similar to those inthe formation processes of n-type work function layer 105. In someembodiments, the processing conditions can be different. Other examplesof p-type work function layers can be the p-type work function layersdescribed above with reference to FIGS. 1 and 2.

At operation 508, n-type work function layers are deposited in openingsof a semiconductor device, in accordance with some embodiments of thepresent disclosure. The openings can be a high aspect ratio (e.g.,greater than 6) opening, such as gate trenches, vias, interconnects, andother high aspect ratio openings. One or more N-type work functionlayers can be deposited on the barrier layer, in accordance with someembodiments. An example of an n-type work function layer is n-type workfunction layer 605 n formed on p-type work function layer 605 p, asshown in FIG. 6D. N-type work function layers can provide appropriatework function value to achieve a nominal transistor threshold voltagefor a semiconductor transistor device. In some embodiments, an n-typework function layer can include TiAlC, TaAlC, TiSiC, any other suitablen-type work function layer material, and/or combinations thereof. N-typework function layers can be formed after barrier layer deposition andformed using various deposition techniques such as ALD, PVD, CVD, PECVD,other suitable deposition processes, and/or combinations thereof. Insome embodiments, n-type work function layers can have a substantiallyuniform thickness between about 10 Å and about 50 Å. MHE processes canbe used with an ALD deposition process to form a conformal n-type workfunction layers having improved step coverage. In some embodiments, anALD process used to produce an n-type work function layer can includepulsing a first precursor into a reaction chamber under vacuum for apredetermined amount of time to allow the first precursor to fully reactwith the substrate surface. Subsequently, a first purging process usingan inert gas is performed in the reaction chamber to remove anyunreacted first precursor material and reaction by-products. A secondprecursor is then pulsed into the reaction chamber to allow surfacereaction with the first precursor and form one or more atomic layers ofn-type work function material. A second purging process is performed inthe reaction chamber to remove any unreacted second precursor materialand any reaction by-products. The deposition cycle is then repeateduntil a nominal film thickness of n-type work function material isachieved. In some embodiments, MHE processes can be performed after oneor more deposition cycles such that overhang can be reduced before thesubsequent deposition cycle begins. For example, an MHE process can beperformed after each deposition cycle, in accordance with someembodiments. MHE process can also be performed in intervals after acertain number of deposition cycles. In some embodiments, MHE processescan be performed after a final nominal film thickness is achieved andprior to the deposition process of a different material. MHE process canefficiently remove overhang formed during the deposition cycle due togreater ion density at the top of the openings compared to the bottom ofthe openings.

In some embodiments, the chlorine-based or fluorine-based metalprecursor for an MHE process can include WCl_(x), SnCl_(x), NbCl_(x),MoCl_(x), where ‘x’ can be between about 1 and about 6. In someembodiments, any other suitable precursors can be used. In someembodiments, the deposition cycle and the MHE process are performedin-situ, for example, performed within a processing system such as anALD cluster tool. In some embodiments, the processing conditions of theMHE process can be similar to the processing conditions used in the MHEprocess during the formation of barrier layer 104. For example,processing conditions such as temperature, precursor flow rates, chamberpressure, processing time, plasma condition, number of cycles, sequenceof cycles, and other processing conditions can be similar between theaforementioned MHE processes. In some embodiments, the processingconditions can be different. Other examples of n-type work functionlayers can be n-type work function layers 105 and 205 as described abovein FIGS. 1 and 2.

At operation 510, blocking layers are deposited in openings of asemiconductor device, in accordance with some embodiments of the presentdisclosure. The openings can be a high aspect ratio (e.g., greater than6) opening, such as gate trenches, vias, interconnects, and other highaspect ratio openings. Blocking layers can be formed on n-type or p-typework function layers, in accordance with some embodiments. An example ofa blocking layer is blocking layer 606 formed on n-type work functionlayer 605 n, as shown in FIG. 6E. Blocking layers can be formed on thework function layers in an in-situ manner, preventing the underlyingwork function layer from contamination or oxidation. Blocking layers canalso be formed in a different deposition chamber within the same clustertool or using a different deposition tool. Blocking layers can includeTiN, TaN, TSN, any other suitable material, and/or combinations thereof.In some embodiments, blocking layers can have a thickness ranging fromabout 5 Å to about 40 Å. Blocking layers can be formed by variousdeposition techniques, such as ALD, PVD, CVD, PECVD, or other suitabletechniques. In some embodiments, the blocking layer 606 can be anoptional layer that can be removed. Similar to the deposition process ofbarrier layer and work function layers, a blocking layer depositionprocess combined with an in-situ MHE process can also provide conformalblocking material deposition and improved step coverage. In someembodiments, the MHE process for forming blocking layer 606 can includeprecursors, such as WClx, SnClx, NbClx, MoClx, where ‘x’ can be betweenabout 1 and about 6. In some embodiments, any other suitable precursorscan be used. Other examples of blocking layers can be blocking layers106 and 206 as described above in FIGS. 1-3B.

At operation 512, metal layers are deposited in openings of asemiconductor device, in accordance with some embodiments of the presentdisclosure. The openings can be a high aspect ratio (e.g., greater than6) opening, such as gate trenches, vias, interconnects, and other highaspect ratio openings. Metal layers can be formed to fill in a remainderof a gate trench in the metal gate stack. An example of a metal layer ismetal layer 607 formed on blocking layer 606, as shown in FIG. 6F, Metallayers can include tungsten, WN, TaN, ruthenium, silver, aluminum, anyother suitable material, and/or combinations thereof. Metal layers canbe formed using a damascene process followed by a planarization processto remove any excessive material formed on the top surface of the ILDlayer. Other examples of metal layers can be metal layers 107 and 207 asdescribed above in FIGS. 1-3B. Referring to FIG. 6F, a metal gate stackis formed including barrier layer 604, p-type work function layer 605 p,n-type work function layer 605 n, blocking layer 606, and metal layer607. The metal gate stack is formed in gate trench 602 described abovein FIG. 6A and can have the same aspect ratio as gate trench 602.Therefore, the metal gate stack can have an aspect ratio between about 6and about 66.

Various embodiments in accordance with this disclosure provide methodsof forming conformal metal layers having improved step coverage in highaspect ratio openings. In some embodiments, the conformal layers formedusing methods described in the present disclosure can also include metalcompound layers and are collectively described as metal layers forsimplicity. The conformal metal layers can be formed using a multi-cycledeposition and in-situ etching process. The formation process caninclude cycles of deposition processes and in-situ etching processes,such as an MHE process. The MHE process can be performed in-situ betweenor at the end of the deposition cycles to etch away excessive depositedmaterial and form a conformal metal layer. In some embodiments, thedeposited metal layer can be substantially conformal. In someembodiments, the deposited material layer can provide substantiallyuniform and continuous material coverage on the sidewalls, bottom, andtop surface of high aspect ratio openings to achieve improved stepcoverage. In some embodiments, the multi-cycle deposition process caninclude an ALD process. In some embodiments, precursors used in the MHEprocess can include chlorine-based or fluorine-based metal precursors.Nominal thickness and quality of the conformal metal layers can bevaried by at least the deposition condition, number of depositioncycles, choices of precursors of the MHE process, number of etchingcycles, parameters of the MHE process, other suitable parameters, and/orcombinations thereof.

In accordance with various embodiments of this disclosure, using thedeposition and in-situ etching process to form conformal gap fill layersin semiconductor structures provides, among other things, benefits of(i) high device reliability and threshold voltage performance due toimproved step coverage in high aspect ratio structures; (ii) reduces oreliminates the need for additional dry etching or wet etching processdue to MHE etching process; and (iii) avoids contamination and reducescost by employing an in-situ etching process that is performed in thesame deposition chamber.

In some embodiments, a method of fabricating a semiconductor structureincludes forming an opening in a substrate and depositing a conformalmetal layer in the opening. The depositing includes performing one ormore deposition cycles. The deposition includes flowing a firstprecursor into a deposition chamber and purging the deposition chamberto remove at least a portion of the first precursor. The method alsoincludes flowing a second precursor into the deposition chamber to forma sublayer of the conformal metal layer and purging the depositionchamber to remove at least a portion of the second precursor. The methodfurther includes performing a metallic halide etching (MHE) process thatincludes flowing a third precursor into the deposition chamber.

In some embodiments, a method of fabricating a semiconductor transistorstructure includes forming an opening on a substrate and depositing abarrier layer in the opening. The method also includes depositing a workfunction layer on the barrier layer using an atomic layer deposition(ALD) process. The method further includes etching, by a metallic halideetching (MHE) process, the work function layer in-situ and depositing ametal layer to fill the opening.

In some embodiments, a semiconductor structure includes a barrier layerover a substrate and a gate stack formed on the barrier layer. The gatestack has an aspect ratio greater than 6 and includes one or more workfunction layers on the barrier layer. A thickness of the one or morework function layers is between about 5 Å and about 50 Å. Thesemiconductor structure also includes a metal layer over the one or morework function layers.

It is to be appreciated that the Detailed Description section, and notthe Abstract of the Disclosure, is intended to be used to interpret theclaims. The Abstract of the Disclosure section may set forth one or morebut not all exemplary embodiments contemplated and thus, are notintended to be limiting to the subjoined claims.

The foregoing disclosure outlines features of several embodiments sothat those skilled in the art may better understand the aspects of thepresent disclosure. Those skilled in the art will appreciate that theymay readily use the present disclosure as a basis for designing ormodifying other processes and structures for carrying out the samepurposes and/or achieving the same advantages of the embodimentsintroduced herein. Those skilled in the art will also realize that suchequivalent constructions do not depart from the spirit and scope of thepresent disclosure, and that they may make various changes,substitutions, and alterations herein without departing from the spiritand scope of the subjoined claims.

What is claimed is:
 1. A method of fabricating a semiconductorstructure, the method comprising: forming an opening in a substrate; anddepositing a conformal metal layer in the opening, wherein thedepositing comprises: performing one or more deposition cycles,comprising: flowing a first precursor into a deposition chamber; purgingthe deposition chamber to remove at least a portion of the firstprecursor; flowing a second precursor into the deposition chamber toform a sublayer of the conformal metal layer; and purging the depositionchamber to remove at least a portion of the second precursor; andperforming a metallic halide etching (MHE) process, comprising flowing athird precursor into the deposition chamber.
 2. The method of claim 1,wherein performing the one or more deposition cycles comprises repeatingthe deposition cycle to deposit a nominal thickness of the conformalmetal layer.
 3. The method of claim 1, wherein performing the MHEprocess comprises performing the MHE process after each of the one ormore deposition cycles.
 4. The method of claim 1, wherein the MHEprocess is performed after the one or more deposition cycles.
 5. Themethod of claim 1, wherein performing the MHE process comprisesperforming the MHE process after a nominal thickness of the conformalmetal layer is deposited.
 6. The method of claim 1, wherein the MHEprocess is performed at a temperature between about 200° C. and about1000° C.
 7. The method of claim 1, wherein the first or second precursorcomprises at least one of titanium tetrachloride (TiCl₄),pentakis-dimethylamino Tantalum (PDMAT), ammonia (NH₃), andtriethylaluminum (TEA).
 8. The method of claim 1, wherein the thirdprecursor comprises a chlorine-based or a fluorine-based metalprecursor.
 9. The method of claim 1, wherein the third precursorcomprises at least one of tungsten fluoride (WF_(x)), tungsten chloride(WCl_(x)), titanium chloride (TiCl_(x)), titanium fluoride (TiF_(x)),tantalum chloride (TaCl_(x)), tin chloride (SnCl_(x)), and molybdenumchloride (MoCl_(x)), wherein x is between about 1 and about
 6. 10. Themethod of claim 1, wherein the MHE process is performed for a timeperiod between about 10 s and about 300 s.
 11. The method of claim 1,wherein performing the MHE process comprises performing the MHE processwithout activation of a plasma.
 12. The method of claim 1, wherein theMHE process is performed at a chamber pressure between about 1 Torr andabout 20 Torr.
 13. The method of claim 1, wherein a flow rate for thethird precursor is between about 100 standard cubic centimeters perminute (sccm) and about 12000 sccm.
 14. The method of claim 1, whereinperforming the MHE process comprises performing the MHE process afterthe one or more deposition cycles without exposing the semiconductorstructure to ambient.
 15. A method of fabricating a semiconductortransistor structure, the method comprising: forming an opening on asubstrate; depositing a barrier layer in the opening; depositing a workfunction layer on the barrier layer using an atomic layer deposition(ALD) process; etching, by a metallic halide etching (MHE) process, thework function layer in-situ; and depositing a metal layer to fill theopening.
 16. The method of claim 15, wherein etching the work functionlayer comprises performing the MHE process is performed during the ALDprocess.
 17. The method of claim 15, wherein etching the work functionlayer comprises performing the MHE process after the ALD process. 18.The method of claim 15, wherein etching the work function layercomprises flowing a precursor into a deposition chamber, wherein theprecursor comprises a chlorine-based or a fluorine-based metalprecursor.
 19. A method comprising: performing a deposition cycle,comprising: flowing a first precursor into a deposition chamber; purgingthe deposition chamber to remove at least a portion of the firstprecursor; flowing a second precursor into the deposition chamber toform a sublayer of a metal layer; purging the deposition chamber toremove at least a portion of the second precursor; and performing ametallic halide etching (MHE) process, comprising flowing a thirdprecursor into the deposition chamber without activation of plasma; andrepeating the deposition cycle to form a plurality of sublayers of themetal layer.
 20. The method of claim 19, wherein the third precursorcomprises at least one of tungsten fluoride (WF_(x)), tungsten chloride(WCl_(x)), titanium chloride (TiCl_(x)), titanium fluoride (TiF_(x)),tantalum chloride (TaCl_(x)), tin chloride (SnCl_(x)), and molybdenumchloride (MoCl_(x)), wherein x is between about 1 and about 6.